JPH0343647Y2 - - Google Patents
Info
- Publication number
- JPH0343647Y2 JPH0343647Y2 JP10740083U JP10740083U JPH0343647Y2 JP H0343647 Y2 JPH0343647 Y2 JP H0343647Y2 JP 10740083 U JP10740083 U JP 10740083U JP 10740083 U JP10740083 U JP 10740083U JP H0343647 Y2 JPH0343647 Y2 JP H0343647Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- condenser lens
- signal
- electron
- control means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 18
- 230000005284 excitation Effects 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10740083U JPS6015754U (ja) | 1983-07-11 | 1983-07-11 | 電子顕微鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10740083U JPS6015754U (ja) | 1983-07-11 | 1983-07-11 | 電子顕微鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6015754U JPS6015754U (ja) | 1985-02-02 |
| JPH0343647Y2 true JPH0343647Y2 (en]) | 1991-09-12 |
Family
ID=30250957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10740083U Granted JPS6015754U (ja) | 1983-07-11 | 1983-07-11 | 電子顕微鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6015754U (en]) |
-
1983
- 1983-07-11 JP JP10740083U patent/JPS6015754U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6015754U (ja) | 1985-02-02 |
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